Incidence of deposition parameters on the structural properties of Y2O3 grown by pulsed injection PE-MOCVD - Archive ouverte HAL Access content directly
Conference Papers Year : 2003

Incidence of deposition parameters on the structural properties of Y2O3 grown by pulsed injection PE-MOCVD

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hal-00484647 , version 1 (18-05-2010)

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  • HAL Id : hal-00484647 , version 1

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C. Durand, Corentin Vallée, O. Salicio, V. Loup, M. Bonvalot, et al.. Incidence of deposition parameters on the structural properties of Y2O3 grown by pulsed injection PE-MOCVD. ECS 203th Meeting, 2003, paris, France. pp.Volume 2003-13. ⟨hal-00484647⟩
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