Conference Papers
Year : 2003
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https://hal.science/hal-00484647
Submitted on : Tuesday, May 18, 2010-5:26:05 PM
Last modification on : Thursday, December 9, 2021-3:32:03 PM
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- HAL Id : hal-00484647 , version 1
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C. Durand, Corentin Vallée, O. Salicio, V. Loup, M. Bonvalot, et al.. Incidence of deposition parameters on the structural properties of Y2O3 grown by pulsed injection PE-MOCVD. ECS 203th Meeting, 2003, paris, France. pp.Volume 2003-13. ⟨hal-00484647⟩
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