3D AFM Characterization of the Edge Roughness of Silicon High Q Resonators
Résumé
Nanophotonic resonators are very sensitive to sidewall roughness. We investigate in detail the sidewall roughness, correlation length and fractal roughness exponent for high Q silicon resonators using a 3D AFM
Domaines
Optique / photonique
Origine : Fichiers produits par l'(les) auteur(s)
Loading...