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https://hal.science/hal-00396832
Submitted on : Friday, June 19, 2009-9:28:08 AM
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M. Bonvalot, Myrtil L. Kahn, Corentin Vallée, C. Dubourdieu, O. R. Joubert. Elaboration, chemical and electrical analyses of intermixal and nanolaminate HfO2-Al2O3 MIM capacitor structures. 54th National Symposium AVS, 2007, SEATTLE, United States. ⟨hal-00396832⟩
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