Elaboration, chemical and electrical analyses of intermixal and nanolaminate HfO2-Al2O3 MIM capacitor structures - Archive ouverte HAL Access content directly
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Elaboration, chemical and electrical analyses of intermixal and nanolaminate HfO2-Al2O3 MIM capacitor structures

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hal-00396832 , version 1 (19-06-2009)

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  • HAL Id : hal-00396832 , version 1

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M. Bonvalot, Myrtil L. Kahn, Corentin Vallée, C. Dubourdieu, O. R. Joubert. Elaboration, chemical and electrical analyses of intermixal and nanolaminate HfO2-Al2O3 MIM capacitor structures. 54th National Symposium AVS, 2007, SEATTLE, United States. ⟨hal-00396832⟩
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