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Single Nanostructure Device fabricated by alternative technologies

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hal-00394410 , version 1 (03-10-2022)

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  • HAL Id : hal-00394410 , version 1

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J. Tallal, T. Pinedo-Rivera, K. Berton, D. Peyrade. Single Nanostructure Device fabricated by alternative technologies. EIPBN - The 51st EIPBN Electron, Ion, Photon Beam Technology and Nanofabrication, May 2007, Denver, United States. ⟨hal-00394410⟩
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