Conference Poster
Year : 2008
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https://hal.science/hal-00392103
Submitted on : Friday, June 5, 2009-3:06:36 PM
Last modification on : Friday, March 24, 2023-2:52:52 PM
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- HAL Id : hal-00392103 , version 1
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E. Rauwel, F. Ducroquet, P. Rauwel, M.-G. Willinger, I. Matko, et al.. Carboxylic acids as oxygen supplying agents for ALD of high k thin films. 8th International Conference on Atomic Layer Deposition,, Jun 2008, Bruges, Belgium. 2008. ⟨hal-00392103⟩
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