Carboxylic acids as oxygen supplying agents for ALD of high k thin films - FMNT - Fédération Micro- et Nano- Technologies Access content directly
Conference Poster Year : 2008
No file

Dates and versions

hal-00392103 , version 1 (05-06-2009)

Identifiers

  • HAL Id : hal-00392103 , version 1

Cite

E. Rauwel, F. Ducroquet, P. Rauwel, M.-G. Willinger, I. Matko, et al.. Carboxylic acids as oxygen supplying agents for ALD of high k thin films. 8th International Conference on Atomic Layer Deposition,, Jun 2008, Bruges, Belgium. 2008. ⟨hal-00392103⟩
62 View
0 Download

Share

Gmail Facebook X LinkedIn More