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https://hal.science/hal-00390544
Submitted on : Tuesday, June 2, 2009-1:41:09 PM
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- HAL Id : hal-00390544 , version 1
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B. Pelissier, C. Durand, Corentin Vallée, M. Bonvalot, L. Vallier, et al.. Pulsed Plasma Enhanced MOCVD of high k Y2O3 layers for gate dielectric applications. Présentation MRS 2002 (fall meeting), 2002, boston, United States. ⟨hal-00390544⟩
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