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SrTiO3/Y2O3 bilayered dielectrics for MIM capacitor elaboration with improved electrical properties

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hal-00390510 , version 1 (02-06-2009)

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  • HAL Id : hal-00390510 , version 1

Cite

Myrtil L. Kahn, Corentin Vallée, E. Defay, M. Bonvalot, C. Dubourdieu, et al.. SrTiO3/Y2O3 bilayered dielectrics for MIM capacitor elaboration with improved electrical properties. Workshop on Dielectrics in Microelectronics WoDiM, 2006, Italy. ⟨hal-00390510⟩
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