MIM capacitors using Y2O3 dielectric grown by pulsed-injection PE-MOCVD
C. Durand
(1)
,
Corentin Vallée
(1)
,
V. Loup
(1)
,
O. Salicio
(1)
,
C. Dubourdieu
(2)
,
S. Blonkowski
(3)
,
M. Bonvalot
(1)
,
P. Holliger
,
O. Joubert
(1)