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Journal Articles Microelectronics Reliability Year : 2007

Improved electrical properties using SrTiO3/Y2O3 bilayer dieclectrics for MIM capacitors applications

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hal-00390392 , version 1 (02-06-2009)

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  • HAL Id : hal-00390392 , version 1

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Myrtil L. Kahn, Corentin Vallée, E. Defay, C. Dubourdieu, M. Bonvalot, et al.. Improved electrical properties using SrTiO3/Y2O3 bilayer dieclectrics for MIM capacitors applications. Microelectronics Reliability, 2007, pp.47 (2007) 773-776. ⟨hal-00390392⟩
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