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Communication Dans Un Congrès Année : 2008

On the degradation of anti-sticking layers during nanoimprint lithography

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hal-00387429 , version 1 (25-05-2009)

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  • HAL Id : hal-00387429 , version 1

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R. Galand, D. Boutry, A. Beaurain, A. Francone, B. Pelissier, et al.. On the degradation of anti-sticking layers during nanoimprint lithography. International Conference on Nanoimprint and Nanoprint technology NNT08, 2008, kyoto, Japan. ⟨hal-00387429⟩
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