Conference Papers
Year : 2006
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https://hal.science/hal-00148420
Submitted on : Tuesday, May 22, 2007-2:31:08 PM
Last modification on : Wednesday, March 10, 2021-9:50:02 AM
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- HAL Id : hal-00148420 , version 1
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M. Gallitre, Jean-Daniel Arnould, Ph. Benech, O. Exshaw, A. Farcy, et al.. Caractérisation électrique de l'isolant inter-armature de capacités Cu-Si3N4-Cu entre 45 MHz et 40 GHz en technologie CMOS 120nm. JCMM 2006, 2006, Grenoble, France. pp.XX. ⟨hal-00148420⟩
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